DUV 266nm generated by fourth-harmonic generationof 1064nm laser radiation into BBO crystal exhibit a complex beam profile which under certain conditions can be approximated by a Gaussian profile.

We have been developing a new “Gaussian-like” beam characterization method to allow our customers to be able to run standard beam propagation tools and get representative results process wise.

The key elements of this method as well as typical values for standard UV microchips are presented in this note.


See the Sales Note :